Preparation and Lifetime Research of Diamond-like Carbon Stripper Foil
摘要: 采用磁过滤阴极真空弧（FCVA）技术，结合交流碳弧（ACCA）技术和松弛技术，制备了~5 μg/cm2的自支撑类金刚石碳（DLC）剥离膜。通过XP2U电子天平、扫描电子显微镜（SEM）、拉曼（Raman）谱仪和X光电子谱（XPS）仪测试分析DLC膜的均匀性和微观结构，结果显示制备的DLC膜表面光滑、基本不含液滴、为典型的非晶DLC膜、sp3杂化键超过70%，Φ100 mm的范围的DLC膜最大不均匀性为8.82%。通过北京HI-13串列加速器提供的系列重离子束测试研究DLC剥离膜的寿命。结果显示，松弛后的DLC剥离膜寿命约为松驰前的3倍；对于63Cu-和197Au-离子束（加速电压~9 Mv、低能端流强~1 μA），DLC剥离膜寿命分别为碳弧碳剥离膜寿命的4倍和13倍；对于107Ag-、70Ge-、48Ti-、28Si-和127I-离子束，DLC剥离膜寿命为碳弧碳剥离膜寿命的2.6～10倍，并且离子越重、束流越强，DLC剥离膜的寿命对比碳弧碳剥离膜寿命的优势就越大；DLC剥离膜寿命与基衬偏压有一定关系，目前的测试结果显示，随基衬偏压的加大，剥离膜寿命呈现先升高后降低的大概趋势，-400 V左右的基衬偏压下DLC剥离膜寿命最长。
Abstract: The diamond-like carbon (DLC) stripper foils with ~5 μg/cm2 in thickness were produced by using the composite technology of the filtered cathodic vacuum arc (FCVA)- alternating current carbon arc (ACCA)-relaxation technique. The uniformity of the DLC foils were measured by the XP2U balance. The results show that the maximum inhomongeneity of DLC foils in the range of Φ100mm is 8.82%. The microstructure of the DLC foils were measured by the scanning electron microscopy (SEM), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS). The SEM images show that the DLC foils are smooth, and contain hardly droplets through the double 90° filters. The Raman spectrum indicates that the DLC foils are amorphous carbon films. The X-ray photoelectron spectrum indicates the sp3 bonds of the DLC foils exceed 70%. The irradiation lifetimes of the DLC stripper foils were tested and compared with the heavy ion beams at the Beijing HI-13 Tandem Accelerator. The results indicate that the lifetime of the DLC stripper foils after relaxation is ~3 times of the DLC stripper foils before relaxation. The lifetime of DLC stripper foil is respectively 4 and 13 times of the carbon stripper foil for the 197Au- and 63Cu- ion beams (~9 Mv, ~1 μA). The lifetime of DLC stripper foil is 2.6-10 times of the carbon stripper foil for the 107Ag-、70Ge-、48Ti-、28Si- and 127I-ion beams. The heavier ions and the stronger beam current, the longer lifetime of DLC stripper foil is compared with that of carbon stripper foil. The lifetime of the DLC stripper foils is related to the substrate bias voltage, and increases at first and then decreases with the increasing of the substrate bias voltage. The lifetime reaches the peak value when the substrate bias voltage is -400 V.