Abstract:
[Background]: RF power source is an important part of NNBI power system. [Purpose]: It provides RF current for RF ion source to generate plasma and maintain stable discharge. [Methods]: According to the design index, the design structure of the all-solid-state power amplifier is proposed, and the design and analysis of the RF channel buffer amplifier, pre-push amplifier, power amplifier, power synthesizer, output matching and filtering are carried out. [Results]: Finally, 150kW RF plasma discharge is realized. [Conclusions]: This circuit structure is feasible on RF ion source discharging.