The 3D NanoimagingBeamline at SSRF

摘要: Full-field transmission X-ray microscopy (TXM) is a powerful nondestructive three-dimensional (3D) imaging method with a nanoscale spatial resolution that has been used in most synchrotron facilities worldwide. An in-house-designed TXM system was constructed at the BL18B 3D Nanoimaging beamline at the Shanghai Synchrotron Radiation Facility. The beamline operates from 5 to 14 keV and enables 20 nm spatial resolution imaging. The characterization details of the beamline are described in this paper. The performances in terms of spatial resolution, nano-CT, and nano-spectral imaging of the TXM beamline are also presented in this article.