Millimeters-Stroke Nanopositioning Actuator With High Positioning and Thermal Stability postprint

Author: Teo, TJ [Teo, Tat Joo][ 1 ] ¹ Bui, VP [Viet Phuong Bui][ 2 ] ¹ Yang, GL [Yang, Guilin][ 3 ] ¹ Chen, IM [Chen, I-Ming][ 4 ] ¹
Submit Time:2017-05-02 12:34:42

Abstract: This paper presented the design and modeling of a novel nanopositioning actuator that delivers millimeters stroke with high positioning and thermal stability. This actuator comprises a unique electromagnetic driving module [EDM] articulated from a segment

Flexure modeling integral equation [IE] nanopositioning permanent magnet [PM] circuits thermal modeling

Subject:
Cite as: ChinaXiv:201705.00574 (or this version ChinaXiv:201705.00574V1)
DOI:10.12074/201705.00574V1
CSTR:32003.36.ChinaXiv.201705.00574.V1
TXID： b7ceda2f-ee18-4b11-8589-1868f794b70f
Recommended references： Teo, TJ [Teo, Tat Joo][ 1 ],Bui, VP [Viet Phuong Bui][ 2 ],Yang, GL [Yang, Guilin][ 3 ],Chen, IM [Chen, I-Ming][ 4 ].Millimeters-Stroke Nanopositioning Actuator With High Positioning and Thermal Stability.中国科学院科技论文预发布平台.[ChinaXiv:201705.00574V1] (Click&Copy)

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2017-05-02 12:34:42

ChinaXiv:201705.00574V1

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