Influence of Substrate Negative Bias on Structure and Properties of TiN Coatings Prepared by Hybrid HIPIMS Method 后印本

作者： Wang, ZY [Wang, Zhenyu][ 1,2 ] ¹ Zhang, D [Zhang, Dong][ 1 ] ¹ Ke, PL [Ke, Peiling][ 1 ] ¹ Liu, XC [Liu, Xincai][ 2 ] ¹ Wang, AY [Wang, Aiying][ 1 ] ¹
提交时间：2017-05-02 12:34:42

摘要: TiN coatings were deposited using a hybrid home-made high power impulse magnetron sputtering [HIPIMS] technique at room temperature. The effects of substrate negative bias voltage on the deposition rate, composition, crystal structure, surface morphology,

TiN Hybrid HIPIMS Substrate bias Microstructure Mechanical properties

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引用： ChinaXiv:201705.00585 (或此版本 ChinaXiv:201705.00585V1)
DOI:10.12074/201705.00585V1
CSTR:32003.36.ChinaXiv.201705.00585.V1
科创链TXID： f421f636-65f5-4b9d-b7bd-c2cd8630c75a
推荐引用方式： Wang, ZY [Wang, Zhenyu][ 1,2 ],Zhang, D [Zhang, Dong][ 1 ],Ke, PL [Ke, Peiling][ 1 ],Liu, XC [Liu, Xincai][ 2 ],Wang, AY [Wang, Aiying][ 1 ].Influence of Substrate Negative Bias on Structure and Properties of TiN Coatings Prepared by Hybrid HIPIMS Method.中国科学院科技论文预发布平台.[ChinaXiv:201705.00585V1] (点此复制)

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2017-05-02 12:34:42

ChinaXiv:201705.00585V1

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