摘要: Cu-containing diamond-like carbon [Cu-DLC] films were deposited on Si/glass substrate by a hybrid ion beam deposition system. The Cu concentration [0.1-39.7 at.%] in the film was controlled by varying the sputtering current. The microstructure and composi
推荐引用方式:Guo, P [Guo, Peng][ 1 ],Sun, LL [Sun, Lili][ 1 ],Li, XW [Li, Xiaowei][ 1 ],Xu, S [Xu, Sheng][ 2 ],Ke, PL [Ke, Peiling][ 1 ],Wang, AY [Wang, Aiying][ 1 ].Structural properties and surface wettability of Cu-containing diamond-like carbon films prepared by a hybrid linear ion beam deposition technique.中国科学院科技论文预发布平台.[ChinaXiv:201705.00338V1] (点此复制)